Study of the etching mechanism of tantalum thin films by argon actinometry

Journal of the Korean Physical Society

Volumn 40, Issue 1, 2002, Pages 160-162

  Kim, Sang Hoon ^a   Woo, Sang Gyun ^a   Ju, Sup Youl ^a   Lee, Kyung Jong ^a   Ahn, Jinho ^a  

^a Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0036002420     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (8)

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