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Sensors and Materials

Volumn 15, Issue 1, 2003, Pages 21-35

Nano-mechanical method for seeding circular-shaped etch pits on (100) silicon surface

(6) Shikida, Mitsuhiro a Kawasaki, Koji a Sato, Kazuo a Ishihara, Yasuo b Tanaka, Hiroshi b Matsumuro, Akihito a

a NAGOYA UNIVERSITY (Japan)

b NONE

Author keywords

Anisotropic wet etching; Etch pit; Nano mechanical contact; Silicon

Indexed keywords

EID: 0037278963 PISSN: 09144935 EISSN: None Source Type: Journal
DOI: None Document Type: Conference Paper

Times cited : (6)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.