Ultraviolet light imprinted sol-gel silica glass waveguide devices on silicon

Optics Communications

Volumn 128, Issue 1-3, 1996, Pages 19-22

  Coudray, P ^a,b   Chisham, J ^b   Malek Tabrizi, A ^a   Li, C Y ^a,b,c   Andrews, M P ^b   Peyghambarian, N ^c   Najafi, S I ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^b MCGILL UNIVERSITY   (Canada)

^c UNIVERSITY OF ARIZONA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; FUSED SILICA; PHOTOLITHOGRAPHY; PHOTOSENSITIVITY; SEMICONDUCTING SILICON; SOL-GELS; SUBSTRATES; SYNTHESIS (CHEMICAL); ULTRAVIOLET RADIATION;

BUFFER LAYER; LOW LOSS GLASS WAVEGUIDES; ONE STEP DIP COATING PROCESS; ORGANICALLY MODIFIED SOL GEL SILICA GLASS; ULTRAVIOLET LIGHT IMPRINTING;

OPTICAL WAVEGUIDES;

EID: 0030191177     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/0030-4018(96)00101-0     Document Type: Article

References (4)

1. S.I. Najafi, ed., Proc. Critical Review Conf. on Integrated Optics and Optical Fiber devices, Proc. SPIE, vol. CR53, 1994.
2. S.I. Najafi, C.Y. Li, M.P. Andrews, J. Chisham, P. Lefebvre, J.D. Mackenzie and N. Peyghambarian, Integrated optics devices by ultraviolet light imprinting in sol-gel silica glass, invited paper, Conf. on Functional Photonic Integrated Circuits, San Jose, Feb. 1995, SPIE Proc. 2401, in press.
3. S.I. Najafi, C.Y. Li, J. Chisham, M.P. Andrews, P. Coudray, A. Malek-Tabrizi and N. Peyghambarian, UV-light imprinted sol-gel silica glass channel waveguides on silicon, Conf. on Glass Integrated Optics and Optical Fiber Devices, San Jose, Feb. 1996, SPIE Proc. 6606, in press.
4. S.I. Najafi, ed., Introduction to Glass Integrated Optics (Artech House, Boston, 1992).