Width determination of SiO2-films in Si-based devices using low-loss EFTEM: Image contrast as a function of sample thickness

Micron

Volumn 34, Issue 1, 2003, Pages 1-7

  Schaffer, Bernhard ^a   Grogger, Werner ^a   Hofer, Ferdinand ^a  

^a GRAZ UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Electron energy loss spectroscopy; Energy filtering transmission electron microscopy; Material contrast; Silicon; Silicon dioxide; Thin films

Indexed keywords

EID: 0037268444     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0968-4328(03)00005-2     Document Type: Article

References (14)

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