Inelastic electron scattering observation using energy filtered transmission electron microscopy for silicon-germanium nanostructures imaging

Microscopy and Microanalysis

Volumn 8, Issue SUPPL. 2, 2002, Pages 1174-1175

  Pantel, R ^a   Jullian, S ^a   Dutartre, D ^a  

^a STMICROELECTRONICS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

SIGE;

EID: 0036413687     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/s1431927602107744     Document Type: Conference Paper

References (3)

1. J.D. Gressler, IEEE Trans on Microwave Technol., 46 (1998) 572
2. S. Jouan et al., IEEE Trans. On Electron Devices, 46 (1999) 1525
3. T. Walther, and C.J. Humphreys, (1999) Journal of Crystal Growth 197, 113