White light phase-shifting interferometry with self-compensation of PZT scanning errors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3740, Issue , 1999, Pages 16-19

  Kim, Seung Woo ^a   Kang, Min Gu ^a   Lee, Sang Yoon ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; MEASUREMENT ERRORS; PHASE SHIFT; PROBABILITY; SAMPLING; SCANNING; SPECTRUM ANALYSIS; SURFACE MEASUREMENT;

WHITE LIGHT INTERFEROMETRY;

INTERFEROMETRY;

EID: 0032597093     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (7)