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Volumn 90, Issue 3, 2002, Pages 213-223

Physical and electrical properties of thin films produced by low energy cluster beam deposition of mixed InxSb1-x clusters

(4) Besson, D a Treilleux, M a Hoareau, A a Esnouf, C b

a UNIVERSITÉ LYON 1 (France)

b UNIVERSITÉ DE LYON (France)

Author keywords

Alloys; Clusters; Electrical conductivity; Indium antimonide; Nanostructures; Thin films; Transmission electron microscopy

Indexed keywords

AMORPHOUS MATERIALS; DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRON DIFFRACTION; ENERGY DISPERSIVE SPECTROSCOPY; MORPHOLOGY; NANOSTRUCTURED MATERIALS; SEMICONDUCTING INDIUM COMPOUNDS; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

LOW ENERGY CLUSTER BEAM DEPOSTION (LECBD); SELECTED AREA ELECTRON DIFFRACTION (SAED);

THIN FILMS;

EID: 0037192413 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-5107(01)00715-2 Document Type: Article

Times cited : (1)

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