Preparation of (001)-oriented PZT thick films on silicon wafer by pulsed laser deposition

Materials Science and Engineering: A

Volumn 269, Issue 1-2, 1999, Pages 67-72

  Liu, J M ^a,b   Xu, S Y ^a   Zhou, W Z ^a   Jiang, X H ^a   Ong, C K ^a   Lim, L C ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b NANJING UNIVERSITY   (China)

Author keywords

Ferroelectric and piezoelectric property; Pulsed laser deposition; PZT thick film

Indexed keywords

DEPOSITION; ELECTRODES; FERROELECTRICITY; FILM PREPARATION; GRAIN SIZE AND SHAPE; PIEZOELECTRICITY; PULSED LASER APPLICATIONS; THERMAL DIFFUSION IN SOLIDS; THICK FILMS;

PULSED LASER DEPOSITIONS; X RAY ROCKING CURVE SCANNING;

SILICON WAFERS;

EID: 0002659318     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0921-5093(99)00181-1     Document Type: Article

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