Transport of submicron particles from a leak to a perpendicular surface in a chamber at reduced pressure

Journal of Aerosol Science

Volumn 27, Issue 5, 1996, Pages 739-750

  Schmidt, F ^a   Fissan, H ^b   Schmidt, K G ^a  

^a Verfahrenstechnik/Umwelttechnik   (Germany)

^b UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AEROSOLS; DEPOSITION; DIFFUSION IN GASES; MATHEMATICAL MODELS; OPTICAL MICROSCOPY; PRESSURE EFFECTS; SEMICONDUCTOR DEVICE MANUFACTURE; SURFACES; TRANSPORT PROPERTIES;

PARTICLE DEPOSITION; SUBATMOSPHERIC PRESSURE; SUBMICRON PARTICLES;

PARTICLES (PARTICULATE MATTER);

LATEX;

AEROSOL; ARTICLE; BOUNDARY LAYER; DIFFUSION; EXPERIMENT; MODEL; PRESSURE; PRIORITY JOURNAL; SEMICONDUCTOR; TEMPERATURE; THERMODYNAMICS; THICKNESS; VELOCITY;

EID: 0030200704     PISSN: 00218502     EISSN: None     Source Type: Journal    
DOI: 10.1016/0021-8502(96)00023-7     Document Type: Article

References (11)

1. Batchelor, G. K. and Shen, C. (1985) Thermophoretic deposition of particles in gas flowing over cold surfaces. J. Colloid Interf. Sci. 107, 21-37.
2. Cooper, D. W., Peters, M. H. and Miller, R. J. (1989) Predicted deposition of submicrometer particles due to diffusion and electrostatics in viscous axisymmetric stagnation-point flow. Aerosol Sci. Technol. 11, 133-143.
3. Friedlander, S. K. (1977) Smoke, Dust and Haze. Wiley, New York.
4. Opiolka, S., Schmidt, F. and Fissan, H. (1994) Combined effect of electrophoresis and thermophoresis on particle deposition onto flat surfaces. J. Aerosol Sci. 25, 665-671.
5. Peterson, T. W., Sannes, K. M., Stratmann, F. and Fissan, H. (1989) Particle deposition on wafers: a comparison between two modelling approaches. J. Aerosol Sci. 20, 683-693.
6. Schlichting, H. (1964) Grenzschichttheorie. Verlag G. Braun, Karlsruhe.
7. Schmidt, F., Fissan, H. and Schmidt, K. G. (1994) Numerische berechnung des partikeltransportes zu einer laminaren angeströmten kreisscheibe. Wärme- und Stoffübertragung 30, 47-54.
8. Schmidt, F., Schmidt, K. G. and Fissan, H. (1990) Methods for detection of submicron particles by a lightmicroscope. J. Aerosol Sci. 21, 535-538.
9. Stratmann, F., Fissan, H. and Peterson. W. T. (1988) Particle deposition onto a flat surface from a point particle source. J. Envir. Sci. 39-41.
10. Stratmann, F. and Whitby, E. R. (1989) Numerical solution of aerosol dynamics for simultaneous convection diffusion and external forces. J. Aerosol Sci. 20, 437-440.
11. Ye, Y., Pui, D. Y. H, Liu, B. Y. H., Opiolka, S. Blumhorst, S. and Fissan, H. (1991) Thermophoretic effect of particle deposition on a free-standing semiconductor wafer in a clean room. J. Aerosol Sci. 22, 63-72.