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Journal of the Electrochemical Society

Volumn 146, Issue 8, 1999, Pages 2901-2905

Effect of thermophoresis on particle deposition in a tungsten low pressure chemical vapor deposition reactor

(3) MacGibbon, B S a,c Busnaina, A A a Fardi, B b

a CLARKSON UNIVERSITY (United States)

b INTEL CORPORATION (United States)

c HUNTAIR Incorporated (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTORS; CHEMICAL VAPOR DEPOSITION; HEAT TRANSFER; MATHEMATICAL MODELS; SILICON WAFERS; SUBSTRATES; TEMPERATURE; THERMAL GRADIENTS; TRANSPORT PROPERTIES; TUNGSTEN;

PARTICLE DEPOSITION; THERMOPHORESIS; TUNGSTEN LOW PRESSURE CHEMICAL VAPOR DEPOSITION REACTOR;

PARTICLES (PARTICULATE MATTER);

EID: 0032592429 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1392026 Document Type: Article

Times cited : (6)

References (12)

1
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- MacGibbon, B.S.¹ Busnaina, A.A.²

2
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- Canon Communications, San Jose, CA
- B. S. MacGibbon and A. A. Busnaina, in Proceedings of the 9th Annual Microcontamination Conference, Canon Communications, p. 267, San Jose, CA (1993).
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- MacGibbon, B.S.¹ Busnaina, A.A.²

3
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4
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- (1994) Proceedings of the 10th Annual Microcontamination Conference
- Geller, A.S.¹ Rader, D.J.² Sibbet, S.³

5
- 0345646767
- San Jose, CA
- D. J. Rader, A. S. Geller, S. J. Choi, and M. J. Kushner, in Proceedings of the 10th Annual Microcontamination Conference, San Jose, CA (1994).
- (1994) Proceedings of the 10th Annual Microcontamination Conference
- Rader, D.J.¹ Geller, A.S.² Choi, S.J.³ Kushner, M.J.⁴

6
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- Personal communication, Intel, Santa Clara, CA
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- (1994)
- Tripathi, S.¹

7
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- John Wiley & Sons, New York
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- (1985) Fundamentals of Heat and Mass Transfer, 2nd Ed.
- Incropera, F.P.¹ DeWitt, D.P.²

8
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- MIE-184
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9
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10
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- American Society of Mechanical Engineers, Minneapolis, MN
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11
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12
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- Batchelor, G.K.¹ Shen, C.²

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