Effect of electrostatic waves on a rf field penetration into highly collisional helicon plasmas

Thin Solid Films

Volumn 407, Issue 1-2, 2002, Pages 215-220

  Shinohara, Shunjiro ^a   Shamrai, Konstantin P ^b  

^a KYUSHU UNIVERSITY   (Japan)

^b INSTITUTE FOR NUCLEAR RESEARCH   (Ukraine)

Author keywords

Helicon plasma; Plasma resistance; Rf field; Skin effect

Indexed keywords

ELECTROSTATICS; HELICONS; MAGNETIC FIELD EFFECTS; PLASMA COLLISION PROCESSES; SKIN EFFECT;

HELICON PLASMAS;

INDUCTIVELY COUPLED PLASMA;

EID: 0037155447     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00041-X     Document Type: Conference Paper

References (19)