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Volumn 66, Issue 3-4, 2002, Pages 359-364
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Production of a large-area argon microwave plasma by a ring slot antenna
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Author keywords
Ar plasma; Large area plasma; Microwave plasma; Processing plasma; Ring slot antenna; Surface wave plasma
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Indexed keywords
ABSORPTION;
ARGON;
DIELECTRIC MATERIALS;
LOW TEMPERATURE EFFECTS;
MAGNETIC FIELD EFFECTS;
MICROWAVES;
SLOT ANTENNAS;
VACUUM;
MICROWAVE PLASMAS;
PLASMA SOURCES;
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EID: 0037136121
PISSN: 0042207X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0042-207X(02)00144-6 Document Type: Article |
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Times cited : (6)
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References (14)
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