Characteristics of a large-diameter surface-wave mode microwave-induced plasma

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 37, Issue 2 PART A, 1998, Pages

  Kaneko, Eiji ^a   Okamoto, Tetsu ^b   Watanabe, Seiichi ^c   Okamoto, Yukio ^a  

^a TOYO UNIVERSITY   (Japan)

^b TOKAI UNIVERSITY   (Japan)

^c HITACHI LTD   (Japan)

Author keywords

Large diameter plasma; Microwave plasma; Okamoto cavity; Processing plasma; Surface wave plasma

Indexed keywords

ARGON; CARRIER CONCENTRATION; CURRENT DENSITY; IONS; MICROWAVES; QUARTZ; SURFACE WAVES;

LANGMUIR PROBES; MICROWAVE PLASMAS; OKAMOTO CAVITY; QUARTZ DISCHARGE TUBES; SURFACE WAVE PLASMAS;

PLASMAS;

EID: 0031997193     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.l170     Document Type: Article

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