A microwave-induced unmagnetized plasma source for plasma processing

Plasma Sources Science and Technology

Volumn 5, Issue 4, 1996, Pages 648-652

  Okamoto, Y ^a  

^a TOYO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRONS; IONS; MICROWAVES; PLASMA APPLICATIONS; PLASMAS;

LANGMUIR PROBE; QUARTZ DISCHARGE TUBE;

PLASMA SOURCES;

EID: 0030281855     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/5/4/006     Document Type: Article

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