Damascene process simulation using molecular dynamics

Journal of Applied Physics

Volumn 92, Issue 12, 2002, Pages 7062-7069

  Ju, Shin Pon ^a   Weng, Cheng I ^a   Hwang, Chi Chuan ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DAMASCENE PROCESS;

COMPUTER SIMULATION; GEOMETRY; MOLECULAR DYNAMICS; MORPHOLOGY; SUBSTRATES;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0037115662     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1519947     Document Type: Article

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