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Journal of Chemical Physics

Volumn 116, Issue 14, 2002, Pages 6291-6296

Dissociative chemisorption of methylsilane on the Si(100) surface

(3) Silvestrelli, Pier Luigi a Sbraccia, Carlo a Ancilotto, Francesco a

a UNIVERSITY OF PADOVA (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; ATOMS; CALCULATIONS; CHEMICAL BONDS; CHEMISORPTION; COMPUTER SIMULATION; DISSOCIATION; MOLECULAR DYNAMICS; MOLECULAR VIBRATIONS; PROBABILITY DENSITY FUNCTION; RELAXATION PROCESSES;

DENSITY FUNCTIONAL THEORY; DISSOCIATIVE CHEMISORPTION; METHYLSILANE; SILICON CARBIDE FILM SYNTHESIS; STRUCTURAL RELAXATION;

SILANES;

EID: 0037041808 PISSN: 00219606 EISSN: None Source Type: Journal
DOI: 10.1063/1.1458933 Document Type: Article

Times cited : (15)

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