Adsorption and decomposition of methylsilanes on Si(100)

Applied Surface Science

Volumn 162, Issue , 2000, Pages 161-167

  Shinohara, Masanori ^a   Maehama, Takehiro ^b   Niwano, Michio ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b UNIVERSITY OF THE RYUKYUS   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; ADSORPTION; ANNEALING; CHEMICAL BONDS; CRYSTAL ORIENTATION; DISSOCIATION; INFRARED SPECTROSCOPY; PYROLYSIS; REACTION KINETICS; SILICON WAFERS; SURFACE STRUCTURE;

METHYLSILANES;

SILANES;

EID: 0034247926     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00186-0     Document Type: Article

References (15)

1. Coon P.A., Wise M.L., Dillon A.C., Robinson M.B., George S.M. J. Vac. Sci. Technol., B. 10:1992;221.
2. Dillon A.C., Robinson M.B., Han M.Y., George S.M. J. Electrochem. Soc. 139:1992;537.
3. Coon P.A., Wise M.L., George S.M. J. Chem. Phys. 98:1993;7485.
4. Schmidt J., Stuhlmann Ch., Ibach H. Surf. Sci. 302:1994;10.
5. Foster M., Darlington B., Scharff J., Campion A. Surf. Sci. 375:1997;35.
6. Wang P.W., Bater S., Zhang L.P., Ascherl M., Craig J.H. Jr. Appl. Surf. Sci. 90:1995;413.
7. Ascherl M., Campbell J.H., Lozano J., Craig J.H. Jr. J. Vac. Sci. Technol., A. 13:1995;2721.
8. N.J. Harrick, Internal Reflection Spectroscopy (Wiley, New York, 1967), second printing (Harrick, Ossining, 1979).
9. Chabal Y.J. Surf. Sci. Rep. 8:1988;211.
10. F.M. Mirabella Jr., N.J. Harrick, Internal Reflection Spectroscopy: Review and Supplement (Harrick, Ossining, 1985).
11. Niwano M., Terashi M., Shinohara M. Surf. Sci. 401:1998;364.
12. Terashi M., Kuge J., Shinohara M., Shoji D., Niwano M. Appl. Surf. Sci. 130-132:1998;260.
13. Niwano M., Terashi M., Kuge J. Surf. Sci. 420:1999;6.
14. Lucovsky G. Solid State Commun. 29:1979;571.
15. Chabal Y.J. Surf. Sci. 168:1986;594.