Evaluating mechanical properties of thin layers using nanoindentation and finite-element modeling: implanted metals and deposited layers

Materials Research Society Symposium - Proceedings

Volumn 438, Issue , 1996, Pages 617-625

  Knapp, J A ^a   Follstaedt, D M ^a   Barbour, J C ^a   Myers, S M ^a   Ager, J W ^a   Monteiro, O R ^a   Brown, I G ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; ELECTRON CYCLOTRON RESONANCE; FINITE ELEMENT METHOD; HARDNESS; MATHEMATICAL MODELS; MECHANICAL PROPERTIES; MECHANICAL VARIABLES MEASUREMENT; PLASMA APPLICATIONS; SURFACE TREATMENT; YIELD STRESS;

ELECTRON CYCLOTRON RESONANCE PLASMA; NANOINDENTATION TESTING; VACUUM ARC DEPOSITION;

THIN FILMS;

EID: 0030358781     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-438-617     Document Type: Conference Paper

References (19)