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Journal of Physics D: Applied Physics

Volumn 35, Issue 5, 2002, Pages 480-486

Ultraviolet absorption measurements of CF 2 in the parallel plate pyrolytic chemical vapour deposition process

(3) Cruden, Brett A a,b Gleason, Karen K a Sawin, Herbert H a

a Massachusetts Institute of Technology Cambridge (United States)

b NASA AMES RESEARCH CENTER (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HEXAFLUOROPROPYLENE OXIDE; MULTICOMPONENT DIFFUSIVE TRANSPORT; POLYTETRAFLUOROETHYLENE FILMS;

ABSORPTION SPECTROSCOPY; CHEMICAL VAPOR DEPOSITION; OLIGOMERS; POLYMERIZATION; PYROLYSIS; REACTION KINETICS; TRANSPORT PROPERTIES; ULTRAVIOLET SPECTROSCOPY;

FLUOROCARBONS;

EID: 0037034918 PISSN: 00223727 EISSN: None Source Type: Journal
DOI: 10.1088/0022-3727/35/5/311 Document Type: Article

Times cited : (16)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.