Laser-induced changes of silicon carbon films studied by vibrational spectroscopy

Vibrational Spectroscopy

Volumn 29, Issue 1-2, 2002, Pages 177-182

  Hobert, H ^a   Dunken, H H ^a   Urban, S ^b   Falk, F ^b   Stafast, H ^b  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

^b LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY   (Germany)

Author keywords

IR; Laser crystallisation; Optical modelling; Raman; Si C alloys; SiC; Thin films

Indexed keywords

AMORPHOUS MATERIALS; CARBON; COMPOSITION EFFECTS; CRYSTALLINE MATERIALS; DIELECTRIC MATERIALS; INFRARED SPECTROSCOPY; LASER BEAMS; MOLECULAR VIBRATIONS; NANOSTRUCTURED MATERIALS; RAMAN SPECTROSCOPY; SILICON; THIN FILMS;

VIBRATIONAL SPECTROSCOPY;

SPECTROSCOPIC ANALYSIS;

EID: 0037024727     PISSN: 09242031     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-2031(01)00200-4     Document Type: Article

References (12)