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Applied Physics A: Materials Science and Processing

Volumn 69, Issue 1, 1999, Pages 69-76

Vibrational spectroscopy of SiC thin films deposited by excimer laser ablation

(6) Hobert, H a Dunken, H H a Peiter, G a Stier, W a Diegel, M b Stafast, H b

a FRIEDRICH SCHILLER UNIVERSITY JENA (Germany)

b LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; DEPOSITION; EXCIMER LASERS; GLASS; INFRARED SPECTROSCOPY; LASER ABLATION; NANOSTRUCTURED MATERIALS; QUARTZ; RAMAN SPECTROSCOPY; SILICON WAFERS; THIN FILMS; ZIRCONIA;

MICROCRYSTALLINE MATERIALS; VIBRATIONAL SPECTROSCOPY;

SILICON CARBIDE;

EID: 0032644348 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s003390050973 Document Type: Article

Times cited : (22)

References (31)

1
- 0004062139
- Akademie Verlag, Berlin
- W.J. Choyke, H. Matsunami, G. Pensl (Eds.): Silicon Carbide. A Review of Fundamental Questions and Applications to Current Device Technology, Vol. 1,2 (Akademie Verlag, Berlin 1997) identical to Phys. Status Solidi B 162 (1977) No. 1 and Phys. Status Solidi B 202 (1997) No. 1
- (1997) Silicon Carbide. A Review of Fundamental Questions and Applications to Current Device Technology , vol.1-2
- Choyke, W.J.¹ Matsunami, H.² Pensl, G.³

2
- 0345368181
- No. 1
- W.J. Choyke, H. Matsunami, G. Pensl (Eds.): Silicon Carbide. A Review of Fundamental Questions and Applications to Current Device Technology, Vol. 1,2 (Akademie Verlag, Berlin 1997) identical to Phys. Status Solidi B 162 (1977) No. 1 and Phys. Status Solidi B 202 (1997) No. 1
- (1977) Phys. Status Solidi B , vol.162

3
- 0344936845
- No. 1
- W.J. Choyke, H. Matsunami, G. Pensl (Eds.): Silicon Carbide. A Review of Fundamental Questions and Applications to Current Device Technology, Vol. 1,2 (Akademie Verlag, Berlin 1997) identical to Phys. Status Solidi B 162 (1977) No. 1 and Phys. Status Solidi B 202 (1997) No. 1
- (1997) Phys. Status Solidi B , vol.202

4
- 5244311861
- W.J. Choyke, G. Pensl: MRS Bulletin 22, 25 (1997)
- (1997) MRS Bulletin , vol.22 , pp. 25
- Choyke, W.J.¹ Pensl, G.²

5
- 0344936844
- R.C. Glass, D. Henshall, V.F. Tsvetkov, C.H. Carter, Jr.: MRS Bulletin 22, 31 (1997)
- (1997) MRS Bulletin , vol.22 , pp. 31
- Glass, R.C.¹ Henshall, D.² Tsvetkov, V.F.³ Carter C.H., Jr.⁴

6
- 1642427059
- D.J. Larkin: MRS Bulletin 22, 36 (1997)
- (1997) MRS Bulletin , vol.22 , pp. 36
- Larkin, D.J.¹

7
- 0000722347
- M. Balooch, R.J. Tench, W.J. Siekhaus, M.J. Allen, A.L. Connor, D.R. Olander: Appl. Phys. Lett. 57, 1540 (1990)
- (1990) Appl. Phys. Lett. , vol.57 , pp. 1540
- Balooch, M.¹ Tench, R.J.² Siekhaus, W.J.³ Allen, M.J.⁴ Connor, A.L.⁵ Olander, D.R.⁶

8
- 0001247299
- L. Rimai, R. Ager, E.M. Longothetis, W.H. Weber, J. Hangas: Appl. Phys. Lett. 59, 2266 (1991)
- (1991) Appl. Phys. Lett. , vol.59 , pp. 2266
- Rimai, L.¹ Ager, R.² Longothetis, E.M.³ Weber, W.H.⁴ Hangas, J.⁵

9
- 36449001219
- L. Rimai, R. Ager, J. Hangas, E.M. Longothetis, A.A. Nayef, M. Aslam: J. Appl. Phys. 73, 8242 (1993)
- (1993) J. Appl. Phys. , vol.73 , pp. 8242
- Rimai, L.¹ Ager, R.² Hangas, J.³ Longothetis, E.M.⁴ Nayef, A.A.⁵ Aslam, M.⁶

10
- 0003093179
- L. Rimai, R. Ager, W.H. Weber, J. Hangas, B.D. Pointdexter: Appl. Phys. Lett. 65, 2171 (1994)
- (1994) Appl. Phys. Lett. , vol.65 , pp. 2171
- Rimai, L.¹ Ager, R.² Weber, W.H.³ Hangas, J.⁴ Pointdexter, B.D.⁵

11
- 0000017519
- M.A. Stan, M.O. Patton, J.D. Warner, J.W. Yang, P. Pirouz: Appl. Phys. Lett. 64, 2667 (1994)
- (1994) Appl. Phys. Lett. , vol.64 , pp. 2667
- Stan, M.A.¹ Patton, M.O.² Warner, J.D.³ Yang, J.W.⁴ Pirouz, P.⁵

12
- 0030283320
- Y. Wang, Y. Tang, W. Chen, W. Cai, H. Tang: Physica B 228, 397 (1996)
- (1996) Physica B , vol.228 , pp. 397
- Wang, Y.¹ Tang, Y.² Chen, W.³ Cai, W.⁴ Tang, H.⁵

13
- 0032000572
- M. Diegel, F. Falk, R. Hergt, H. Hobert, H. Stafast: Appl. Phys. A 66. 183 (1998)
- (1998) Appl. Phys. A , vol.66 , pp. 183
- Diegel, M.¹ Falk, F.² Hergt, R.³ Hobert, H.⁴ Stafast, H.⁵

14
- 0347031965
- J. Meinschien, F. Falk, H. Hobert, H. Stafast: Appl. Surf. Sci. 138-139, 543-139 (1999)
- (1999) Appl. Surf. Sci. , vol.138-139 , pp. 543-1139
- Meinschien, J.¹ Falk, F.² Hobert, H.³ Stafast, H.⁴

15
- 0030565969
- H. Stafast, L. Redlich, T. Kohler, K. Steenbeck, M. Diegel: Appl. Surf. Sci. 196, 335 (1996)
- (1996) Appl. Surf. Sci. , vol.196 , pp. 335
- Stafast, H.¹ Redlich, L.² Kohler, T.³ Steenbeck, K.⁴ Diegel, M.⁵

16
- 0003443571
- CRC Press, Boca Raton, New York, London, Tokyo
- A.M. Efimov: Optical Constants of Inorganic Glasses (CRC Press, Boca Raton, New York, London, Tokyo 1995)
- (1995) Optical Constants of Inorganic Glasses
- Efimov, A.M.¹

17
- 0344936843
- E-mail: theiss@acds10.physik. rwth-aachen.de
- W. Theiss: program package SCOUT, E-mail: theiss@acds10.physik. rwth-aachen.de
- Program Package SCOUT
- Theiss, W.¹

18
- 33751173751
- W.G. Spitzer, D.A. Kleinman, D. Walsh: Phys. Rev. 113, 127 (1959)
- (1959) Phys. Rev. , vol.113 , pp. 127
- Spitzer, W.G.¹ Kleinman, D.A.² Walsh, D.³

19
- 36049058134
- L. Patrick: Phys. Rev. 167, 809 (1968)
- (1968) Phys. Rev. , vol.167 , pp. 809
- Patrick, L.¹

20
- 26744445785
- D.W. Berreman: Phys. Rev. 130, 2193 (1963)
- (1963) Phys. Rev. , vol.130 , pp. 2193
- Berreman, D.W.¹

21
- 84975545298
- C. Christiansen: Ann. Phys. Chem. NF 23, 259, 298 (1884). See also Bergmann, Schäfer: Lehrbuch der Experimentalphysik, Bd. III, Optik, 8. Aufl. (Walter de Gruyter, Berlin, New York 1987) p. 316
- (1884) Ann. Phys. Chem. NF 23 , vol.259 , pp. 298
- Christiansen, C.¹

22
- 0004150493
- Bd. III, Optik, 8. Aufl. Walter de Gruyter, Berlin, New York
- C. Christiansen: Ann. Phys. Chem. NF 23, 259, 298 (1884). See also Bergmann, Schäfer: Lehrbuch der Experimentalphysik, Bd. III, Optik, 8. Aufl. (Walter de Gruyter, Berlin, New York 1987) p. 316
- (1987) Lehrbuch der Experimentalphysik , pp. 316
- Bergmann, S.¹

23
- 0031190138
- S. Nakashima, H. Harima: Phys. Status Solidi A 162, 39 (1997)
- (1997) Phys. Status Solidi A , vol.162 , pp. 39
- Nakashima, S.¹ Harima, H.²

24
- 36049060168
- D.W. Feldman, J.H. Parker, Jr., W.J. Choyke, L. Patrick: Phys. Rev. 170, 698 (1968)
- (1968) Phys. Rev. , vol.170 , pp. 698
- Feldman, D.W.¹ Parker J.H., Jr.² Choyke, W.J.³ Patrick, L.⁴

25
- 2142836248
- D.W. Feldman, J.H. Parker, Jr., W.J. Choyke, L. Patrick: Phys. Rev. 173, 787 (1968)
- (1968) Phys. Rev. , vol.173 , pp. 787
- Feldman, D.W.¹ Parker J.H., Jr.² Choyke, W.J.³ Patrick, L.⁴

26
- 0028760299
- A. Chehaidar, R. Carles, A. Zwick, C. Meunier, B. Cros, J. Durand: J. Non-Cryst. Solids 169, 37 (1994)
- (1994) J. Non-cryst. Solids , vol.169 , pp. 37
- Chehaidar, A.¹ Carles, R.² Zwick, A.³ Meunier, C.⁴ Cros, B.⁵ Durand, J.⁶

27
- 0014829099
- F. Tuinstra, J.L. Koenig: J. Chem. Phys. 53, 1126 (1978)
- (1978) J. Chem. Phys. , vol.53 , pp. 1126
- Tuinstra, F.¹ Koenig, J.L.²

28
- 33645143382
- R.O. Dillon, J.A. Woollam, V. Katkanant: Phys. Rev. B 29, 3482 (1984)
- (1984) Phys. Rev. B , vol.29 , pp. 3482
- Dillon, R.O.¹ Woollam, J.A.² Katkanant, V.³

29
- 0028320130
- J.F. DiGrigorio, T.E. Furtak: Solid State Commun. 89, 163 (1994)
- (1994) Solid State Commun. , vol.89 , pp. 163
- DiGrigorio, J.F.¹ Furtak, T.E.²

30
- 36149063536
- R. Ruppin, R. Englman: Rep. Prog. Phys. 33, 149 (1970)
- (1970) Rep. Prog. Phys. , vol.33 , pp. 149
- Ruppin, R.¹ Englman, R.²

31
- 0000333919
- Y. Sasaki, Y. Nishima, M. Sato, K. Okamura: Phys. Rev. B 40, 1762 (1989)
- (1989) Phys. Rev. B , vol.40 , pp. 1762
- Sasaki, Y.¹ Nishima, Y.² Sato, M.³ Okamura, K.⁴

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