Nanometer-scale pores in low-k dielectric films probed by positron annihilation lifetime spectroscopy

Applied Physics Letters

Volumn 81, Issue 23, 2002, Pages 4413-4415

  Wang, C L ^a   Weber, M H ^a   Lynn, K G ^a   Rodbell, K P ^b  

^a WASHINGTON STATE UNIVERSITY   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENTROPY; FINITE DIFFERENCE METHOD; MESOPOROUS MATERIALS; PERMITTIVITY; PORE SIZE; POROSITY; POSITRON ANNIHILATION SPECTROSCOPY;

CLOSED POROSITY DISTRIBUTIONS;

DIELECTRIC FILMS;

EID: 0037011555     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1526923     Document Type: Article

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