Growth of the large area horizontally-aligned carbon nanotubes by ECR-CVD

Thin Solid Films

Volumn 420-421, Issue , 2002, Pages 225-229

  Hsu, Chih Ming ^a   Lin, Chao Hsun ^a   Chang, Hui Lin ^a   Kuo, Cheng Tzu ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Carbon; Chemical vapor deposition; Field emission; Scanning electron microscopy

Indexed keywords

CATALYSTS; CHEMICAL VAPOR DEPOSITION; ELECTRON CYCLOTRON RESONANCE; GASES; MICROELECTRONICS; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SYNTHESIS (CHEMICAL);

ELECTRON CYCLOTRON RESONANCE CHEMICAL VAPOR DEPOSITION (ECR-CVD);

CARBON NANOTUBES;

EID: 0037011165     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00799-X     Document Type: Conference Paper

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