Interface control of Gd2O3/GaAs system using pre-deposition of Gd metal on GaAs substrate with native oxides

Thin Solid Films

Volumn 420-421, Issue , 2002, Pages 571-574

  Yang, Jun Kyu ^a   Kang, Min Gu ^a   Park, Hyung Ho ^a  

^a Yonsei University   (South Korea)

Author keywords

Gd2O3 Gd GaAs; Interface control; Native oxides; Reduction

Indexed keywords

CRYSTALLINE MATERIALS; DEPOSITION; ETCHING; GADOLINIUM COMPOUNDS; HEATING; INTERFACES (MATERIALS); OXIDES; PASSIVATION; REDUCTION; SEMICONDUCTING GALLIUM ARSENIDE;

INTERFACE CONTROL;

MOS DEVICES;

EID: 0037011034     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00838-6     Document Type: Conference Paper

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