SCOPUS 정보 검색 플랫폼

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 12, 2002, Pages 7327-7331

Ohmic contact properties of tungsten plug and ferroelectric properties of (Bi,La)4Ti3O12 thin film in stacked capacitor structure

(6) Kweon, Soon Yong a Kim, Nam Kyeong a Choi, Eun Seok a Yeom, Seung Jin a Roh, Jae Sung a Park, Young Jin a

a Hynix Semiconductor Inc (South Korea)

Author keywords

BLT ferroelectric film; Contact resistance of plug; Hysteresis curve; Mega bit FeRAM; Pt IrOx Ir electrode; W plug

Indexed keywords

BISMUTH COMPOUNDS; CAPACITORS; CHEMICAL MECHANICAL POLISHING; CURRENT DENSITY; DECOMPOSITION; ELECTRIC POTENTIAL; ELECTRODES; FILM PREPARATION; METALLIZING; OHMIC CONTACTS; RANDOM ACCESS STORAGE; SWITCHING; TUNGSTEN;

STACKED CAPACITOR STRUCTURE;

FERROELECTRIC THIN FILMS;

EID: 0036995495 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.41.7327 Document Type: Article

Times cited : (8)

References (11)

1
- 0002791793
- K. Kim: Integral. Ferroelectr. 36 (2001) 21.
- (2001) Integral. Ferroelectr. , vol.36 , pp. 21
- Kim, K.¹

2
- 0032592396
- J. Kudo, M. Nagata, N. Ogata, S. Yamazaki, H. Urashima, A. Okutoh, T. Miyoshi and K. Ishihara: Mater. Res. Soc. Symp. Proc. 541 (1999) 61.
- (1999) Mater. Res. Soc. Symp. Proc. , vol.541 , pp. 61
- Kudo, J.¹ Nagata, M.² Ogata, N.³ Yamazaki, S.⁴ Urashima, H.⁵ Okutoh, A.⁶ Miyoshi, T.⁷ Ishihara, K.⁸

3
- 0036313921
- S.Y. Kweon, S. K. Choi, W. S. Yang, S. J. Yeom and J. S. Roh: Jpn. J. Appl. Phys. 41 (2002) 66.
- (2002) Jpn. J. Appl. Phys. , vol.41 , pp. 66
- Kweon, S.Y.¹ Choi, S.K.² Yang, W.S.³ Yeom, S.J.⁴ Roh, J.S.⁵

4
- 0013312401
- Nara
- S. Y. Kweon, N. K. Kim, E. S. Choi, S. J. Yeom and J. S. Roh: Abstr. Int. Joint Conf. Appl. Ferroelectrics, Nara, 2002, p. 43.
- (2002) Abstr. Int. Joint Conf. Appl. Ferroelectrics , pp. 43
- Kweon, S.Y.¹ Kim, N.K.² Choi, E.S.³ Yeom, S.J.⁴ Roh, J.S.⁵

5
- 0029290956
- C.A. Paz de Arauzo, J. D. Cuchiaro, L. D. McMillan, M. C. Scott and J. F. Scott: Nature 374 (1995) 627.
- (1995) Nature , vol.374 , pp. 627
- Paz de Arauzo, C.A.¹ Cuchiaro, J.D.² McMillan, L.D.³ Scott, M.C.⁴ Scott, J.F.⁵

6
- 0034262669
- W.S. Yang, S. J. Yeom, N. K. Kim, S. Y. Kweon and J. S. Roh: Jpn. J. Appl. Phys. 39 (2000) 5465.
- (2000) Jpn. J. Appl. Phys. , vol.39 , pp. 5465
- Yang, W.S.¹ Yeom, S.J.² Kim, N.K.³ Kweon, S.Y.⁴ Roh, J.S.⁵

7
- 0033554712
- B.H. Park, B. S. Kang, S. D. Bu, T. W. Noh, J. Lee and W. Jo: Nature 401 (1999) 682.
- (1999) Nature , vol.401 , pp. 682
- Park, B.H.¹ Kang, B.S.² Bu, S.D.³ Noh, T.W.⁴ Lee, J.⁵ Jo, W.⁶

8
- 0013317020
- N.K. Kim. W. S. Yang, S. J. Yeom, S. Y. Kweon, E. S. Choi and J. S. Roh: Integrat. Ferroelectr. 39 (2001) 81.
- (2001) Integrat. Ferroelectr. , vol.39 , pp. 81
- Kim, N.K.¹ Yang, W.S.² Yeom, S.J.³ Kweon, S.Y.⁴ Choi, E.S.⁵ Roh, J.S.⁶

9
- 0036478517
- W.S. Yang, N. K. Kim, S. J. Yeom, S. Y. Kweon and J. S. Roh: Jpn. J. Appl. Phys. 41 (2002) 727.
- (2002) Jpn. J. Appl. Phys. , vol.41 , pp. 727
- Yang, W.S.¹ Kim, N.K.² Yeom, S.J.³ Kweon, S.Y.⁴ Roh, J.S.⁵

10
- 0013268885
- Butterworth-Heinemann, Boston, Chap. 4
- S.P. Murarka: Metallization Theory and Practice for VLSI and ULSI (Butterworth-Heinemann, Boston, 1993) Chap. 4, p. 61.
- (1993) Metallization Theory and Practice for VLSI and ULSI , pp. 61
- Murarka, S.P.¹

11
- 21544468235
- S. E. Cummins and L. E. Cross: J. Appl. Phys. 39 (1968) 2268.
- (1968) J. Appl. Phys. , vol.39 , pp. 2268
- Cummins, S.E.¹ Cross, L.E.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.