A high stability electrode technology for stacked SrBi2Ta2O9 capacitors

Materials Research Society Symposium - Proceedings

Volumn 541, Issue , 1999, Pages 61-70

  Kudo, J ^a   Nagata, M ^a   Ogata, N ^a   Yamazaki, S ^a   Urashima, H ^a   Okutoh, A ^a   Miyoshi, T ^a   Ishihara, K ^a  

^a SHARP CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC CAPACITORS; ELECTRIC CONNECTORS; ELECTRIC CONTACTS; ELECTRIC INSULATING MATERIALS; HYSTERESIS; STRONTIUM COMPOUNDS;

BARRIER METAL; POLYSILICON PLUGS; STACKED CAPACITOR;

ELECTROCHEMICAL ELECTRODES;

EID: 0032592396     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (3)

1. S.Onishi,et.al., IEDM Digest of Technical Papers, p.843, 1994
2. J.Kudo,et.al., IEDM Digest of Technical Papers, p.609, 1997
3. E.Kolawa,et.al, IEEE Electron Devices Lett., vol.12,no.6, P.321, 1991