Stacked Pt/BLT/Pt/IrOx/Ir capacitor for high density feram

Integrated Ferroelectrics

Volumn 39, Issue 1-4, 2001, Pages 81-89

  Kim, Nam Kyeong ^a   Yang, Woo Seok ^a   Yeom, Seung Jin ^a   Kweon, Soon Yong ^a   Choi, Eun Seok ^a   Roh, Jae Sung ^a  

^a Hynix Semiconductor Inc   (South Korea)

Author keywords

Ferroelectric properties; High density FeRAM; La substituted bismuth titanate (BLT); Poly plug; Stacked capacitor

Indexed keywords

CONTACT RESISTANCE; CRYSTALLIZATION; FERROELECTRIC MATERIALS; LEAKAGE CURRENTS; OPTIMIZATION; PLATINUM; POLARIZATION; RANDOM ACCESS STORAGE;

FATIGUE CYCLES; METALORGANIC DECOMPOSITION;

CAPACITORS;

EID: 0013317020     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580108011930     Document Type: Conference Paper

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