High speed drilling of metals with a long pulse XeCl excimer laser

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4760, Issue II, 2002, Pages 667-677

  Schoonderbeek, Aart ^a   Biesheuvel, Cornelis A ^a   Hofstra, Ramon M ^a   Boller, Klaus J ^b   Meijer, Johan ^b  

^a Nederlands Centrum voor Laser Research BV   (Netherlands)

^b UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Excellent beam quality; Excimer; Laser drilling; Pulse length; XeCl

Indexed keywords

ALUMINUM FOIL; DRILLING; LASER PULSES; MASKS; POLARIZATION; SPEED;

HIGH SPEED DRILLING;

EXCIMER LASERS;

EID: 0036442811     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.482139     Document Type: Conference Paper

References (7)

1. J.C.M. Timmermans, R.M. Hofstra, J. Couperus, R. Kleijhorst, H. Prins, G. Oude Meijers, H.J.G. van Heel, "Development of NCLR's 1kW XeCl laser", in Advanced High-Power Lasers, Marek Osiński, Howard T. Powell, Koichi Toyoda, ed., Proc. SPIE 3889, pp. 360-367, 2000.
2. R.M. Hofstra, J.C.M. Timmermans, H.J.G. van Heel, "On the optical quality of NCLR's 1-kW, 1-kHz XeCl excimer laser", in Advanced High-Power Lasers, Marek Osiński, Howard T. Powell, Koichi Toyoda, ed., Proc. SPIE 3889, pp. 388-395, 2000.
3. A.E. Siegman, Laser's, University Science Books, Mill Valley, California, 1986.
4. E. Hecht, Optics, Addison-Wesley Publishing Company, Reading, Massachusetts, 1998.
5. T.J. McKee, "Optical cavity design for long pulse excimer lasers", Applied Optics 30, pp. 635-644, 1991.
6. S.W. Williams, P.J. Marsden, N.C. Roberts, J. Sidhu, M.A. Venables, "Excimer laser beam shaping and material processing using diffractive optics" in High power Laser Ablation, Claude R. Phipps, ed., Proc. SPIE 3343, pp. 205-211, 1998.
7. K.H. Song, X. Xu, "Mechanisms of absorption in pulsed excimer laser-induced plasma", Appl. Phys. A 65, pp. 477-485, 1997.