메뉴 건너뛰기




Volumn 85, Issue 12, 2002, Pages 3108-3110

Preparation of lead zirconate titanate thin films derived by hybrid processing: Sol-gel method and laser ablation

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL MICROSTRUCTURE; CRYSTALLIZATION; LASER ABLATION; NUCLEATION; PERMITTIVITY; SCANNING ELECTRON MICROSCOPY; SOL-GELS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

EID: 0036967995     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.2002.tb00592.x     Document Type: Article
Times cited : (33)

References (14)
  • 1
    • 0030197147 scopus 로고    scopus 로고
    • Ferroelectric thin films in microelectricmechanical systems applications
    • D. L. Polla and L. F. Francis, "Ferroelectric Thin Films in Microelectricmechanical Systems Applications," Mater. Res. Soc. Bull., 21 [6] 59-66 (1996).
    • (1996) Mater. Res. Soc. Bull. , vol.21 , Issue.6 , pp. 59-66
    • Polla, D.L.1    Francis, L.F.2
  • 2
    • 0032154046 scopus 로고    scopus 로고
    • Application of gas jet deposition method to piezoelectric thick film miniature actuator
    • A. Schroth, R. Maeda, J. Akedo, and M. Ichiki, "Application of Gas Jet Deposition Method to Piezoelectric Thick Film Miniature Actuator," Jpn. J. Appl. Phys., 37 [9] 5342-44 (1998).
    • (1998) Jpn. J. Appl. Phys. , vol.37 , Issue.9 , pp. 5342-5344
    • Schroth, A.1    Maeda, R.2    Akedo, J.3    Ichiki, M.4
  • 3
    • 0033537528 scopus 로고    scopus 로고
    • Application of sol-gel deposited thin film for actuation of 1D and 2D scanners
    • A. Schroth, C. Lee, S. Matsumoto, and R. Maeda, "Application of Sol-Gel Deposited Thin Film for Actuation of 1D and 2D Scanners," Sens. Actuators, 73, 144-52 (1999).
    • (1999) Sens. Actuators , vol.73 , pp. 144-152
    • Schroth, A.1    Lee, C.2    Matsumoto, S.3    Maeda, R.4
  • 4
    • 0034317719 scopus 로고    scopus 로고
    • Novel multibridge-structured piezoelectric microdevice for scanning force microscopy
    • J. Chu, Z. Wang, R. Maeda, K. Kataoka, T. Itoh, and T. Suga, "Novel Multibridge-Structured Piezoelectric Microdevice for Scanning Force Microscopy," J. Vac. Sci. Technol., B18 [6] 3604-607 (2000).
    • (2000) J. Vac. Sci. Technol. , vol.B18 , Issue.6 , pp. 3604-3607
    • Chu, J.1    Wang, Z.2    Maeda, R.3    Kataoka, K.4    Itoh, T.5    Suga, T.6
  • 8
    • 0032319695 scopus 로고    scopus 로고
    • Effect of pyrolysis temperature on the characteristics of PZT films deposited by the sol-gel method
    • C. W. Law, K. Y. Tong, J. H. Li, and K. Li, "Effect of Pyrolysis Temperature on the Characteristics of PZT Films Deposited by the Sol-Gel Method," Thin Solid Films, 335, 220-24 (1998).
    • (1998) Thin Solid Films , vol.335 , pp. 220-224
    • Law, C.W.1    Tong, K.Y.2    Li, J.H.3    Li, K.4
  • 9
    • 0033717632 scopus 로고    scopus 로고
    • Effect of heat treatment on preferred orientation of sol-gel deposited PZT thin films
    • Z. J. Wang, R. Maeda, and K. Kikuchi, "Effect of Heat Treatment on Preferred Orientation of Sol-Gel Deposited PZT Thin Films," J. Jpn. Inst. Met., 64 [5] 383-86 (2000).
    • (2000) J. Jpn. Inst. Met. , vol.64 , Issue.5 , pp. 383-386
    • Wang, Z.J.1    Maeda, R.2    Kikuchi, K.3
  • 10
    • 0032636536 scopus 로고    scopus 로고
    • Preparation and characterization of sol-gel derived PZT thin films for micro actuators
    • Z. L. Wang, R. Maeda, and K. Kikuchi, "Preparation and Characterization of Sol-Gel Derived PZT Thin Films for Micro Actuators," SPIE Proc., 3680, 948-55 (1999).
    • (1999) SPIE Proc. , vol.3680 , pp. 948-955
    • Wang, Z.L.1    Maeda, R.2    Kikuchi, K.3
  • 12
    • 0034262439 scopus 로고    scopus 로고
    • Effect of Pb content in target on electrical properties of laser ablation derived PZT thin films
    • Z. J. Wang, K. Kikuchi, and R. Maeda, "Effect of Pb Content in Target on Electrical Properties of Laser Ablation Derived PZT Thin Films," Jpn. J. Appl. Phys., 39 [9] 5413-17 (2000).
    • (2000) Jpn. J. Appl. Phys. , vol.39 , Issue.9 , pp. 5413-5417
    • Wang, Z.J.1    Kikuchi, K.2    Maeda, R.3
  • 13
    • 0035455043 scopus 로고    scopus 로고
    • Microstructure and electrical properties of lead zirconate titanate thin films deposited by excimer laser ablation
    • Z. J. Wang, R. Maeda, M. Ichiki, and H. Kokawa, "Microstructure and Electrical Properties of Lead Zirconate Titanate Thin Films Deposited by Excimer Laser Ablation," Jpn. J. Appl. Phys., 40 [9] 5523-27 (2001).
    • (2001) Jpn. J. Appl. Phys. , vol.40 , Issue.9 , pp. 5523-5527
    • Wang, Z.J.1    Maeda, R.2    Ichiki, M.3    Kokawa, H.4
  • 14
    • 0034507025 scopus 로고    scopus 로고
    • Development of phases and texture in sol-gel derived lead zirconate titanate thin films prepared by three-step heat-treatment process
    • Z. J. Wang, R. Maeda and K. Kikuchi, "Development of Phases and Texture in Sol-Gel Derived Lead Zirconate Titanate Thin Films Prepared by Three-Step Heat-Treatment Process," J. Mater. Sci., 35, 5915-20 (2000).
    • (2000) J. Mater. Sci. , vol.35 , pp. 5915-5920
    • Wang, Z.J.1    Maeda, R.2    Kikuchi, K.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.