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Volumn 183, Issue 1-2, 1998, Pages 23-30

The effect of the III/V ratio and substrate temperature on the morphology and properties of GaN- and AlN-layers grown by molecular beam epitaxy on Si(1 1 1)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; FILM GROWTH; LOW TEMPERATURE EFFECTS; MOLECULAR BEAM EPITAXY; MORPHOLOGY; PHOTOLUMINESCENCE; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTING SILICON; STOICHIOMETRY; SUBSTRATES;

EID: 0031700776     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(97)00386-2     Document Type: Article
Times cited : (327)

References (22)
  • 13
    • 0041718417 scopus 로고    scopus 로고
    • note
    • In the case of GaN growth, this step was also tested (opening the Ga shutter a short time before activating the nitrogen plasma) but the result was not satisfactory: the RHEED pattern was not fully recovered and at some point during the growth it faded out.
  • 14
    • 0042719799 scopus 로고    scopus 로고
    • note
    • The term stoichiometric condition is used in this paper referring to the III/V ratio where the growth rate starts to saturate and there is no excess of the group III element (i.e. no droplets on the surface).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.