Characteristics and crystal structure of the Ba(ZrxTi1-x)O3 thin films deposited by RF magnetron sputtering

Journal of Crystal Growth

Volumn 246, Issue 1-2, 2002, Pages 99-107

  Wang, Moo Chin ^a   Chen, Chung Yi ^b   Hsi, Chi Shiung ^c   Wu, Nan Chung ^b  

^a NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^c I SHOU UNIVERSITY   (Taiwan)

Author keywords

A1. Crystal structure; A3. Polycrystalline deposition; B1. Perovskites; B2. Ferroelectric materials

Indexed keywords

BARIUM COMPOUNDS; CRYSTAL ORIENTATION; CRYSTAL STRUCTURE; ENERGY DISPERSIVE SPECTROSCOPY; MAGNETRON SPUTTERING; PEROVSKITE; POLYCRYSTALLINE MATERIALS; PROFILOMETRY; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION;

COLUMNAR STRUCTURE;

FERROELECTRIC THIN FILMS;

EID: 0036888328     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(02)01787-6     Document Type: Article

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