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Applied Surface Science

Volumn 180, Issue 1-2, 2001, Pages 65-72

Strain in coherent cobalt silicide islands formed by reactive epitaxy

(3) Bennett, P A a Smith, D J a Robinson, I K b

a ARIZONA STATE UNIVERSITY (United States)

b University of Illinois at Urbana Champaign (United States)

Author keywords

Coherent island; Reactive epitaxy; Silicide; Strain

Indexed keywords

COBALT COMPOUNDS; STRAIN; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

COBALT SILICIDES;

METALLIC FILMS;

EID: 0035426472 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(01)00321-X Document Type: Article

Times cited : (11)

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