Comparison of atomic force microscopy imaging methods and roughness determinations for a highly polished quartz surface

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 6, 2002, Pages 2183-2186

  Dokou, Eleni ^a   Zhang, Lanping ^a   Barteau, Mark A ^a  

^a University of Delaware   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANGLE MEASUREMENT; ATOMIC FORCE MICROSCOPY; CONTACT ANGLE; FREE ENERGY; MORPHOLOGY; QUARTZ; ULTRAHIGH VACUUM;

NANOSCALE RESOLUTION; SCANNING PROBE MICROSCOPY;

SURFACE ROUGHNESS;

EID: 0036883088     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1513633     Document Type: Article

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