Quantifying the value of ownership of yield analysis technologies

IEEE Transactions on Semiconductor Manufacturing

Volumn 15, Issue 4, 2002, Pages 411-419

  Weber, Charles ^a   Sankaran, Vijay ^b   Tobin Jr , Kenneth W ^c   Scher, Gary ^d  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b Inventes Corporation   (United States)

^c OAK RIDGE NATIONAL LABORATORY   (United States)

^d Sleuthworks Inc   (United States)

Author keywords

Analysis; Information theory; Learning; Management; Ownership; Value; Yield

Indexed keywords

BENCHMARKING; DEFECTS; INFORMATION THEORY; RESEARCH AND DEVELOPMENT MANAGEMENT; SILICON WAFERS;

YIELD ANALYSIS;

SEMICONDUCTOR MATERIALS;

EID: 0036869940     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2002.804876     Document Type: Conference Paper

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