Image paradigm for semiconductor defect data reduction

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2725, Issue , 1996, Pages 194-205

  Tobin Jr , Kenneth W ^a   Gleason, Shaun S ^a   Karnowski, Thomas P ^a   Sari Sarraf, Hamed ^a   Bennett, Marylyn H ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTOR DEFECT DATA;

AUTOMATION; DATA PROCESSING; DEFECTS; IMAGE PROCESSING; IMAGING TECHNIQUES; OPTICAL RESOLVING POWER; PROCESS CONTROL; SAMPLING; STATISTICAL METHODS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0029748836     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)