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Volumn 20, Issue 6, 2002, Pages 1997-2003

Subsurface interstitials as promoters of three-dimensional growth of Ti on Si(111): An x-ray standing wave, x-ray photoelectron spectroscopy, and atomic force microscopy investigation

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; ATOMIC FORCE MICROSCOPY; GROWTH (MATERIALS); MORPHOLOGY; SEMICONDUCTING SILICON; SURFACE PHENOMENA; THERMAL EFFECTS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0036865191     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1513638     Document Type: Article
Times cited : (2)

References (50)
  • 4
    • 0012035143 scopus 로고
    • M. Iwami, S. Hashimoto, and A. Hiraki, Solid State Commun. 49, 459 (1984); A. Franciosi and J.H. Weaver, Surf. Sci. 132, 324 (1983).
    • (1983) Surf. Sci. , vol.132 , pp. 324
    • Franciosi, A.1    Weaver, J.H.2
  • 13
    • 0003269304 scopus 로고
    • Metal impurities in silicon-device fabrication
    • edited by H.K.V. Lotsch, Springer, Heidelberg
    • K. Graft, in Metal Impurities in Silicon-Device Fabrication, edited by H.K.V. Lotsch, Springer Series in Materials Science Vol. 24 (Springer, Heidelberg, 1995).
    • (1995) Springer Series in Materials Science , vol.24
    • Graft, K.1
  • 34
    • 0025458577 scopus 로고
    • R. Sinclair, Mater. Trans., JIM 31, 628 (1990); K. Holloway and R. Sin-clair, J. Less-Common Met. 140, 139 (1988).
    • (1990) Mater. Trans., JIM , vol.31 , pp. 628
    • Sinclair, R.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.