Characterization of a silicon-based shear-force sensor on human subjects

IEEE Transactions on Biomedical Engineering

Volumn 49, Issue 11, 2002, Pages 1340-1347

  Wang, Lin ^b   Beebe, David J ^a,c  

^a IEEE   (United States)

^b University of Illinois at Urbana Champaign   (United States)

^c University of Wisconsin Madison   (United States)

Author keywords

Force; Human object interface; MEMS; Sensor; Shear; Silicon

Indexed keywords

PIEZORESISTIVE EFFECTS;

DIAPHRAGMS; FABRICATION; MICROELECTROMECHANICAL DEVICES; SENSORS; SILICON; SKIN;

BIOMEDICAL ENGINEERING;

SILICON;

ADULT; ANALYTICAL ERROR; ARTICLE; CALCULATION; CONTROLLED STUDY; FEMALE; FORCE; HUMAN; HUMAN EXPERIMENT; MALE; MATHEMATICAL ANALYSIS; MECHANICS; NORMAL HUMAN; SENSOR; SHEAR STRESS; SKIN; TECHNOLOGY;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; HAND; HAND STRENGTH; HUMANS; MINIATURIZATION; MODELS, THEORETICAL; MONITORING, PHYSIOLOGIC; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; SILICON; SKIN PHYSIOLOGY; STRESS, MECHANICAL; TRANSDUCERS;

EID: 0036847073     PISSN: 00189294     EISSN: None     Source Type: Journal    
DOI: 10.1109/TBME.2002.804586     Document Type: Article

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