CMOS compatible traction stress sensing element for use in high resolution tactile imaging

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 648-651

  Kane, Bart J ^a   Kovacs, Gregory T A ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELASTOMERS; ETCHING; OPTIMIZATION; PERFORMANCE; PIEZOELECTRIC MATERIALS; RESISTORS; ROBOT APPLICATIONS; SHEAR STRESS; SIGNAL PROCESSING; SILICON SENSORS; SUBSTRATES;

CMOS COMPATIBLE TRACTION STRESS SENSORS; POINT TRACTION STRESS; ROBOTIC TACTILE SENSING; TRACTION STRESS SENSOR TEST BED CHIP;

ACTUATORS;

EID: 0029517967     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)