Characterization of charge trapping in insulating films by a scanning electron microscope

Journal of Applied Physics

Volumn 85, Issue 10, 1999, Pages 7443-7447

  Bigarre J ^a   Hourquebie, P ^a  

^a CEA LE RIPAULT   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BREAKDOWN OF SOLIDS; ELECTRIC CHARGE; ELECTRIC POTENTIAL; ELECTROSTATICS; MATHEMATICAL MODELS; SCANNING ELECTRON MICROSCOPY;

CHARGE TRAPPING; INSULATING FILMS; SCANNING ELECTRON MICROSCOPE MIRROR (SEMM) METHOD;

ELECTRIC INSULATING MATERIALS;

EID: 0032607883     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.369376     Document Type: Article

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