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Volumn 3, Issue 1, 1999, Pages 73-83
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Microassembly of a piezoelectric miniature motor
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Author keywords
[No Author keywords available]
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Indexed keywords
CERAMIC MATERIALS;
PIEZOELECTRIC DEVICES;
SILICON;
SOLDERING;
STRENGTH OF MATERIALS;
TORQUE;
MICROASSEMBLY;
PIEZOELECTRIC MINIATURE MOTORS;
ELECTRIC MOTORS;
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EID: 0032644335
PISSN: 13853449
EISSN: None
Source Type: Journal
DOI: 10.1023/A:1009971001001 Document Type: Article |
Times cited : (17)
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References (9)
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