Nano-oxidation of titanium films with large atomically flat surfaces by means of voltage-modulated scanning probe microscopy

Surface and Interface Analysis

Volumn 34, Issue 1, 2002, Pages 490-493

  Unal, Kerem ^a   Aronsson, Björn Owe ^a   Mugnier, Yannick ^a   Descouts, Pierre ^a  

^a UNIVERSITY OF GENEVA   (Switzerland)

Author keywords

Atomic force microscopy; Atomically flat surfaces; Lithography; Oxidation; Titanium; Voltage modulation atomic force microscopy

Indexed keywords

ATOMIC FORCE MICROSCOPY; LITHOGRAPHY; MORPHOLOGY; NANOSTRUCTURED MATERIALS; OXIDATION; SURFACE ROUGHNESS; SURFACE STRUCTURE; VOLTAGE MEASUREMENT;

NANO OXIDATION; ROOT MEAN SQUARE ROUGHNESS; SCANNING PROBE MICROSCOPY; VOLTAGE MODULATION ATOMIC FORCE MICROSCOPY;

TITANIUM;

EID: 0036694160     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1345     Document Type: Conference Paper

References (13)

1. Appl. Phys. Lett.