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Sensors and Actuators: A. Physical
Volumn 48, Issue 3, 1995, Pages 203-214
Surface micromachined microengine
Author keywords

Microengines; Surface micromachining
Indexed keywords

ACTUATORS; ELECTROSTATIC DEVICES; MICROMACHINING; MOTION CONTROL; SURFACE TREATMENT; VARIABLE SPEED DRIVES;
EID: 0029296809     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(95)00999-X     Document Type: Article
Times cited : (167)
References (23)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.