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Volumn 38, Issue 16, 2002, Pages 921-923

Gate-to-drain separation and transistor cutoff frequency in wet etched AlGaN/GaN HFETs

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC RESISTANCE; ETCHING; HETEROJUNCTIONS; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0036684603     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20020641     Document Type: Article
Times cited : (9)

References (8)
  • 3
    • 0000008175 scopus 로고    scopus 로고
    • Smooth wet etching by ultraviolet-assisted photoetching and its application to the fabrication of AlGaN/GaN heterostructure field-effect transistors
    • (2000) Appl. Phys. Lett. , vol.77 , pp. 3833-3835
    • Maher, H.1    Disanto, D.W.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.