Low temperature poly-Si TFT-LCD transferred onto plastic substrate using surface free technology by laser ablation/annealing (SUFTLA®)

SID Conference Record of the International Display Research Conference

Volumn , Issue , 2001, Pages 339-342

  Utsunomiya, S ^a   Saeki, T ^a   Inoue, S ^a   Shimoda, T ^a  

^a SEIKO EPSON CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; INTEGRATED CIRCUITS; LASER ABLATION; LOW TEMPERATURE OPERATIONS; POLYSILICON; THIN FILM TRANSISTORS;

SURFACE FREE TECHNOLOGY;

LIQUID CRYSTAL DISPLAYS;

EID: 0035783073     PISSN: 10831312     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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