Polysilicon TFT on plastics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4295, Issue , 2001, Pages 52-59

  Shimoda, T ^a   Inoue, S ^a   Utsunomiya, S ^a  

^a SEIKO EPSON CORPORATION   (Japan)

Author keywords

LCD; Plastic substrate; Poly Si TFTs; SUFTLA ; Transfer process

Indexed keywords

ANNEALING; CMOS INTEGRATED CIRCUITS; DEGRADATION; LASER ABLATION; LIQUID CRYSTAL DISPLAYS; LOW TEMPERATURE OPERATIONS; OSCILLATORS (ELECTRONIC); PLASTICS; POLYSILICON; QUARTZ; SUBSTRATES;

RING OSCILLATORS; SURFACE FREE TECHNOLOGY;

THIN FILM TRANSISTORS;

EID: 0034872476     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.424888     Document Type: Conference Paper

References (12)