SCOPUS 정보 검색 플랫폼

Solid-State Electronics

Volumn 46, Issue 8, 2002, Pages 1139-1143

Novel applications of X-ray analysis to microelectronic materials and devices

(1) Cargill III, G S a

a Lehigh University (United States)

Author keywords

Deformation potential; DX center; Electromigration; Microelectronic materials; X ray analysis

Indexed keywords

ELECTRIC CONDUCTORS; ELECTROMIGRATION; FLUORESCENCE; GALLIUM COMPOUNDS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTOR MATERIALS; SYNCHROTRONS; X RAY ANALYSIS; X RAY DIFFRACTION;

MICROELECTRONIC MATERIALS; X-RAY MICROBEAN DIFFRACTION;

MICROELECTRONICS;

EID: 0036680367 PISSN: 00381101 EISSN: None Source Type: Journal
DOI: 10.1016/S0038-1101(02)00056-4 Document Type: Article

Times cited : (4)

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