A quantum-well-intermixing process for wavelength-agile photonic integrated circuits

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 8, Issue 4, 2002, Pages 863-869

  Skogen, Erik J ^a,b   Barton, Jonathon S ^a,b   Denbaars, Steven P ^a,b   Coldren, Larry A ^a,b  

^a IEEE   (United States)

^b University of California   (United States)

Author keywords

Ion implantation; Laser tuning; Semiconductor lasers; Wavelength division multiplexing

Indexed keywords

PHOTONIC INTEGRATED CIRCUITS; QUANTUM WELL INTERMIXING PROCESS;

INTEGRATED CIRCUIT MANUFACTURE; ION IMPLANTATION; LASER TUNING; METALLORGANIC CHEMICAL VAPOR DEPOSITION; RAPID THERMAL ANNEALING; REACTIVE ION ETCHING; SEMICONDUCTOR LASERS; SEMICONDUCTOR QUANTUM WELLS; WAVELENGTH DIVISION MULTIPLEXING;

INTEGRATED OPTOELECTRONICS;

EID: 0036661969     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2002.800849     Document Type: Article

References (17)

1. V. Jayaraman, Z. Chuang, and L. Coldren, "Theory, design, and performance of extended tuning range semiconductor lasers with sampled gratings," IEEE J. Quantum Electron., vol. 29, pp. 1824-1834, June 1993.
2. H. Ishii, H. Tanobe, F. Kano, Y. Tohmori, Y. Kondon, and Y. Yoshikuni, "Quasicontinuous wavelength tuning in super-structure-grating (SSG) DBR lasers," IEEE J. Quantum Electron., vol. 32, pp. 433-441, Mar. 1996.
3. I. Avrutsky, D. Ellis, A. Tager, H. Anis, and J. Xu, "Design of widely tunable semiconductor lasers and the concept of binary superimposed gratings (BSG's)," IEEE J. Quantum Electron., vol. 34, pp. 729-741, Apr. 1998.
4. B. Mason, G. Fish, S. DenBaars, and L. Coldren, "Widely tunable sampled grating DBR lasers with integrated electroabsorption modulator," IEEE Photon. Technol. Lett., vol. 11, pp. 638-640, June 1999.
5. B. Mason, J. Barton, G. Fish, and L. Coldren, "Design of sampled grating DBR lasers with integrated semiconductor optical amplifiers," IEEE Photon. Technol. Lett., vol. 12, pp. 762-764, July 2000.
6. B. Mason, S. DenBaars, and L. Coldren, "Tunable sampled-grating DBR lasers with integrated wavelength monitors," IEEE Photon. Technol. Lett., vol. 10, pp. 1085-1087, Aug. 1998.
7. N. Holonyak, Jr., "Impurity-induced layer disordering of quantum-well heterostructures: Discovery and prospects," IEEE J. Select. Topics Quantum Electron., vol. 4, pp. 584-594, July-Aug. 1998.
8. S. K. Si, D. H. Yeo, K. H. Yoon, and S. J. Kim, "Area selectivity of InGaAsP-InP multiquantum-well intermixing by impurity-free vacancy diffusion," IEEE J. Select. Topics Quantum Electron., vol. 4, pp. 619-623, July-Aug. 1998.
9. A. McKee, C. McLean, G. Lullo, A. Bryce, R. De La Rue, J. Marsh, and C. Button, "Monolithic integration in InGaAs-InGaAsP multiple-quantum-well structures using laser intermixing," IEEE J. Quantum Electron., vol. 33, pp. 45-55, Jan. 1997.
10. S. Charbonneau, E. Kotels, P. Poole, J. He, G. Aers, J. Haysom, M. Buchanan, Y. Feng, A. Delage, F. Yang, M. Davie R. Goldberg, P. Piva, and I. Mitchell, "Photonic integrated circuits fabricated using ion implantation," IEEE J. Select. Topics Quantum Electron., vol. 4, pp. 772-793, July-Aug. 1998.
11. D. Deppe and N. Holonyak, Jr., "Atom diffusion and impurity-induced layer disordering in quantum well III-V semiconductor heterostructures," J. Appl. Phys., vol. 64, pp. 93-113, 1988.
12. B. Qui, A. Bryce, R. De La Rue, and J. Marsh, "Monolithic integration in InGaAs-InGaAs multiquantum-well structure using laser processing," IEEE Photon. Technol. Lett., vol. 10, pp. 769-771, June 1998.
13. S. McDougall, O. Kowalski, C. Hamilton, F. Camacho, B. Qiu, M. Ke, R. De La Rue, A. Bryce, and J. Marsh, "Monolithic integration via a universal damage enhanced quantum-well intermixing technique," IEEE J. Select. Topics Quantum Electron., vol. 4, pp. 636-646, July-Aug. 1998.
14. M. Paquette, J. Beauvais, J. Beerens, P. Poole, S. Charbonneau, C. Miner, and C. Blaauw, "Blueshifting of InGaAsP/InP laser diodes by low-energy ion implantation," Appl. Phys. Lett., vol. 71, pp. 3749-3751, 1999.
15. M. Amann and W. Thulke, "Current confinement and leakage currents in planar buried-ridge-structure laser diodes on n-substrate," IEEE J. Quantum Electron., vol. 25, pp. 1595-1602, July 1989.
16. L. Coldren and S. Corzine, Diode Lasers and Photonic Integrated Circuits. New York: Wiley, 1995, p. 456.
17. J. Shim, M. Yamaguchi, P. Delansay, and M. Kitamura, "Refractive index and loss changes produced by current injection in InGaAs(P)-InGaAsP multiple quantum-well (MQW) waveguides," IEEE J. Select. Topics Quantum Electron., vol. 1, pp. 408-415, June 1995.