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Volumn 20, Issue 4, 2002, Pages 1481-1485
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Physical properties of nitrogen-doped diamond-like amorphous carbon films deposited by supermagnetron plasma chemical vapor deposition
a
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS FILMS;
DOPING (ADDITIVES);
ELECTRIC CONDUCTIVITY OF SOLIDS;
ENERGY GAP;
GLASS;
MAGNETRON SPUTTERING;
NITROGEN;
OPTICAL PROPERTIES;
PLASMA DENSITY;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
PLASMA HEATING;
SILICON WAFERS;
DIAMOND-LIKE AMORPHOUS CARBON FILM;
GLASS WAFERS;
OPTICAL BAND GAP;
SUPERMAGNETRON PLASMA CHEMICAL VAPOR DEPOSITION;
DIAMOND LIKE CARBON FILMS;
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EID: 0036649759
PISSN: 07342101
EISSN: None
Source Type: Journal
DOI: 10.1116/1.1488946 Document Type: Article |
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Times cited : (12)
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References (15)
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