SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 19, Issue 4, 2001, Pages 1577-1581

Supermagnetron plasma chemical vapor deposition and qualitative analysis of electrically conductive diamond-like amorphous carbon films

(2) Kinoshita, Haruhisa a Yoshida, Masahiro a

a SHIZUOKA UNIVERSITY (Japan)

Author keywords

C

Indexed keywords

EID: 0009970504 PISSN: 07342101 EISSN: 15208559 Source Type: Journal
DOI: 10.1116/1.1349720 Document Type: Conference Paper

Times cited : (5)

References (15)

1
- 0019592245
- IEMGAQ, IEMGAQ
- F. K. King, IEEE Trans. Magn. IEMGAQ 17, 1376 (1981).IEMGAQ
- (1981) IEEE Trans. Magn. , vol.17 , pp. 1376
- King, F.K.¹

2
- 35949039711
- PRBMDO, PRBMDO
- F. J. Himpsel, J. A. Knapp, J. A. van Vechten, and D. E. Eastman, Phys. Rev. B PRBMDO 20, 624 (1979).PRBMDO
- (1979) Phys. Rev. B , vol.20 , pp. 624
- Himpsel, F.J.¹ Knapp, J.A.² van Vechten, J.A.³ Eastman, D.E.⁴

3
- 0015080715
- JAPIAU, JAPIAU
- S. Aisenberg and R. Chabot, J. Appl. Phys. JAPIAU 53, 2953 (1971).JAPIAU
- (1971) J. Appl. Phys. , vol.53 , pp. 2953
- Aisenberg, S.¹ Chabot, R.²

4
- 0002219179
- THSFAP, THSFAP
- L. Holland and S. M. Ojha, Thin Solid Films THSFAP 38, L17 (1976).THSFAP
- (1976) Thin Solid Films , vol.38 , pp. L17
- Holland, L.¹ Ojha, S.M.²

5
- 0030557510
- JVTAD6, JVTAD6
- S. Fujimaki, H. Matsumoto, Y. Kokaku, M. Kitoh, and N. Tsumita, J. Vac. Sci. Technol. A JVTAD6 14, 194 (1996).JVTAD6
- (1996) J. Vac. Sci. Technol. A , vol.14 , pp. 194
- Fujimaki, S.¹ Matsumoto, H.² Kokaku, Y.³ Kitoh, M.⁴ Tsumita, N.⁵

6
- 0042219151
- JVTBD9, JVTBD9
- H. Kinoshita and O. Matsumoto, J. Vac. Sci. Technol. B JVTBD9 9, 325 (1991).JVTBD9
- (1991) J. Vac. Sci. Technol. B , vol.9 , pp. 325
- Kinoshita, H.¹ Matsumoto, O.²

7
- 0034155682
- JVTAD6, JVTAD6
- H. Kinoshita, S. Nomura, and M. Honda, J. Vac. Sci. Technol. A JVTAD6 18, 367 (2000).JVTAD6
- (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 367
- Kinoshita, H.¹ Nomura, S.² Honda, M.³

8
- 0001732335
- APPLAB, APPLAB
- G. A. J. Amaratunga and S. R. P. Silva, Appl. Phys. Lett. APPLAB 68, 2529 (1996).APPLAB
- (1996) Appl. Phys. Lett. , vol.68 , pp. 2529
- Amaratunga, G.A.J.¹ Silva, S.R.P.²

9
- 0034156150
- JVTBD9, JVTBD9
- K. Sawada, H. Kinoshita, T. Masuda, and M. Ishida, J. Vac. Sci. Technol. B JVTBD9 18, 1044 (2000).JVTBD9
- (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 1044
- Sawada, K.¹ Kinoshita, H.² Masuda, T.³ Ishida, M.⁴

10
- 0001073938
- JAPIAU, JAPIAU
- H. Kinoshita, F. Fukushima, M. Kando, Y. Nakagawa, and T. Tsukada, J. Appl. Phys. JAPIAU 88, 2263 (2000).JAPIAU
- (2000) J. Appl. Phys. , vol.88 , pp. 2263
- Kinoshita, H.¹ Fukushima, F.² Kando, M.³ Nakagawa, Y.⁴ Tsukada, T.⁵

11
- 0042411983
- PSSABA, PSSABA
- O. Stenzel, M. Vogel, S. Pönitz, R. Petrich, T. Wallendorf, C. v. Borczyskowski, F. Rozploch, Z. Krasilnik, and N. Kalugin, Phys. Status Solidi A PSSABA 140, 179 (1993).PSSABA
- (1993) Phys. Status Solidi A , vol.140 , pp. 179
- Stenzel, O.¹ Vogel, M.² Pönitz, S.³ Petrich, R.⁴ Wallendorf, T.⁵ Borczyskowski, C.v.⁶ Rozploch, F.⁷ Krasilnik, Z.⁸ Kalugin, N.⁹

12
- 0001048603
- JAPIAU, JAPIAU
- H. Kinoshita, T. Hando, and M. Yoshida, J. Appl. Phys. JAPIAU 89, 2737 (2001).JAPIAU
- (2001) J. Appl. Phys. , vol.89 , pp. 2737
- Kinoshita, H.¹ Hando, T.² Yoshida, M.³

13
- 0000425471
- JAPIAU, JAPIAU
- S. R. P. Silva, J. Robertson, G. A. J. Amaratunga, B. Rafferty, L. M. Brown, J. Schwan, D. F. Franceschini, and G. Mariotto, J. Appl. Phys. JAPIAU 81, 2626 (1997).JAPIAU
- (1997) J. Appl. Phys. , vol.81 , pp. 2626
- Silva, S.R.P.¹ Robertson, J.² Amaratunga, G.A.J.³ Rafferty, B.⁴ Brown, L.M.⁵ Schwan, J.⁶ Franceschini, D.F.⁷ Mariotto, G.⁸

14
- 0025464039
- JACTAW, JACTAW
- M. R. Wixom, J. Am. Ceram. Soc. JACTAW 73, 1973 (1990).JACTAW
- (1990) J. Am. Ceram. Soc. , vol.73 , pp. 1973
- Wixom, M.R.¹

15
- 0001477915
- JAPIAU, JAPIAU
- J. V. Anguita, S. R. P. Silva, A. P. Burden, B. J. Sealy, S. Haq, M. Hebbron, I. Sturland, and A. Pritchard, J. Appl. Phys. JAPIAU 86, 6276 (1999).JAPIAU
- (1999) J. Appl. Phys. , vol.86 , pp. 6276
- Anguita, J.V.¹ Silva, S.R.P.² Burden, A.P.³ Sealy, B.J.⁴ Haq, S.⁵ Hebbron, M.⁶ Sturland, I.⁷ Pritchard, A.⁸

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.