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Volumn 12, Issue 4, 2002, Pages 475-478
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Postbuckled micromachined square membranes under differential pressure
a
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPRESSIVE STRESS;
COMPUTER SIMULATION;
ELASTIC MODULI;
FINITE ELEMENT METHOD;
MATHEMATICAL MODELS;
MICROSTRUCTURE;
PHASE TRANSITIONS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
PRESSURE;
SILICON NITRIDE;
SILICON WAFERS;
SUBSTRATES;
DEFLECTION PROFILE;
DIFFERENTIAL PRESSURE;
LOAD DEFLECTION RESPONSE;
POSTBUCKLED MICROMACHINED SQUARE MEMBRANES;
REFLECTION SYMMETRY;
SYMMETRY TRANSITION;
THIN FILMS;
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EID: 0036646672
PISSN: 09601317
EISSN: None
Source Type: Journal
DOI: 10.1088/0960-1317/12/4/322 Document Type: Article |
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Times cited : (22)
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References (12)
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